Product Center
LED&Semiconductor Industry
Ecosys M91A
M91A is the first of its kind plasma gasification and wet abatement system that consumes very low power to break the highly stable materials like fluorinated compounds into smaller molecules.
M91A is developed and tested as a point-of-use abatement system to treat PFCs loaded gases that are mainly found in today’s demanding semiconductor and flat panel display process chemical industries.
M91A meets the industry standard for controlled decomposition and oxidation treatment of fluorinated green
Application
All semiconductor & flat panel displays
Advantages
Low power consumption
Excellent PFCs abatement efficiency
Limited NOx and COx emission
High flow capacity
Low cost of ownership
Ease of installation and services
SEMI S2 compliance, CE marked
Ethernet ready
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Hong Kong Headquarters
Address: 13A Weswick Commercial Building, No.147 Queen's Road East, Wanchai, Hong Kong
Telephone:+852 28662978
Fax:+852 28662013
Email:admin@bb-technology.com.hk
Xiamen Office
Telephone:+86 (592) 5083007/5083006
Taiwan Office
Telephone:+886-2-77253668
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